RESEARCH

Micro/nano fabrication, Measurement and control platform
source:     time:2023-01-10

The micro/nano fabrication, measurement and control platform contains an optical forming system, a high vacuum ebeam evaporation system, a micro/nano dispersion instrument, a profiliermeter and a 3D high-precision profile measuring instrument, an acousto-optic multi-field micro/nano control system. It is suitable for the fabrication and characterization of 2D/3D micro/nano multi-material structures and the research of the development of micro/nano propellers and their control.