RESEARCH

The constant temperature and humidity experimental environment system is applied to maintain the environmental temperature, humidity, and cleanliness during manufacturing to meet the requirements of micro/nano fabrication (Temperature fluctuation: 22±2℃; Humidity fluctuation: 50±10 %RH; Cleanliness: thousand level). It is used in the platform of Artificial Intelligence and Intelligent Manufacturing to fabricate novel micro/nano devices including micro/nano robots, micro-electromechanical systems (MEMS), and microfluidic lab-on-a-chip devices for applications in biomedical, quantum communication, information storage, etc.