周绍林 Zhou Shaolin

基本信息

职称:微电子学院副教授、硕导
Title: Associate Professor, Graduate Supervisor, School of Microelectronics.
联系方式:eeslzhou@scut.edu.cn
Honor: Guangzhou Pearl River science and technology new star, Hong Kong Scholar

个人简历

周绍林,广州市珠江科技新星(2017年度),香江学者计划入选者(2015年度),2006年本科毕业于哈尔滨工业大学,2011年博士毕业于中国科学院光电技术研究所,先后于加拿大西安大略大学(University of Western Ontario2013.02~2014.10)、香港科技大学(HKUST,2016.01~2018.01)开展博士后研究工作,主要面向新型微纳电子与光电子集成器件、3D微纳加工技术(微光刻3D打印),包括太赫兹THz及红外电磁(光子)器件、半导体光电子集成器件,例如电磁超表面滤波器、基于相变介质的电控光子器件(传感器、光电开关、调制器等)领域。先后获得国家自然科学基金(1项)以及广东省科技计划等省部级项目(6项)资助,发表学术论文60余篇,其中第一作者&通讯作者发表SCI论文近30篇,获中国专利近30项,授权10余项。

Shaolin Zhou is an Associate Professor from the School of Microelectronics, South China University of Technology. He received his BSc from Harbin Institute of Technology, P. R. China in 2006, PhD from Institute of Optics& electronics, CAS. He also visited Western University (Canada) as a post-doctoral fellow in 2013-2015 and Hong Kong University of Science and Technology in 2016-2018 as a visiting scholar under Hong Kong scholar program. His research interest comprises the micro/nanofabrication & optoelectronic devices, MEOMS, optoelectronics etc. He also serves in the peer-review process of several journals including Carbon, ACS photonics, Optics Letter, Optics Express, Applied Optics, IEEE Photonics Technology Letter, IEEE Photonics Journal etc.

教育经历

2013/02- 2014/10:加拿大西安大略大学(UWO, University of Western Ontario)博士后;

2007/07 - 2011/07:中科院光电技术研究所,测试计量技术及仪器,硕博连读研究生;

2006/07 - 2007/07:中科院研究生院,检测技术及自动化装置,硕士学位课;

2002/09 - 2006/07:哈尔滨工业大学,测控技术与仪器(光电信息工程),学士;

工作经历

2018.09-至今, 华南理工大学, 微电子学院, 副教授

2016.9-2018.08, 华南理工大学, 电子与信息学院, 副教授

2016.1-2018.1, 香港科技大学, 电子与计算机工程系, 香江学者

2013.2-2014.10, 加拿大西安大略大学, 机械与材料工程系, 博士后

2011.1-2016.9, 华南理工大学, 电子与信息学院, 讲师

研究方向

微纳光子及光电子集成器件(集成超表面&超构器件、硅基光子器件、红外探测器件等)、红外及太赫兹器件(超表面、滤波器、吸波器等)、微加工工艺技术(光刻工艺、微流体器件、微光电子器、MEMS等)、数字投影光固化3D打印技术。 

授课课程

《固体物理》、《半导体物理》、《集成电路制造技术》

学术任职

Carbon, Advanced photonics, Optics letter, IEEE photonics technology letter, Optics express, Advanced optical materials等国际期刊审稿人

科研项目(部分列表)

2017/06-2020/06:广州市创新人才专项珠江科技新星专题,“微器件的紫外光刻3D打印技术研究及应用”; 

2015/01-2017/12:国家自然科学基金-青年科学基金项目,“结合立体光刻3D打印的太赫兹金属网滤波器优化加工工艺研究”;

2015/06-2017/12:广东省科技计划-2014公益研究与能力建设项目(战略新兴产业),“数字投影微光刻3D打印及复合材料、结构相关技术研究与开发”;

2015/09-2017/09:香江学者特别资助基金项目,“微纳米孔阵列结构自支撑金属膜器件的自上而下设计与加工;

2015/06-2016/12:华南理工大学中央高校基本科研业务费-重点项目,“太赫兹复合结构选频器及其立体光刻 3D 打印研究”;

代表性科研成果(论文、专利等)

1.Shaolin, Zhou, Liang Liu, Qinling Deng, Shaowei Liao, Quan Xue, and Mansun Chan, “Intercoupling of Cascaded Metasurfaces for Broadband Spectral Scalability,” Materials (Basel). 16, 1–19 (2023).

2.Shaolin Zhou, Liang Liu, Zhijian Chen et al, Polarization-multiplexed metaholograms with erasable functionality, J. Phys. D. Appl. Phys. 56, 155102:1–12 (2023). DOI 10.1088/1361-6463/acbf61

3.Ruirui, Song; Qinling, Deng; Shaolin, Zhou*, Photonic meta-switch based on phase change and catenary-enabled continuous phase regulation, Wuli Xuebao/Acta Phys. Sin. 71, 029101:1–7 (2022).

4.Ruirui, Song; Qinling, Deng; Shaolin, Zhou*; Mingbo, Pu. Catenary-based phase change metasurfaces for mid-infrared switchable wavefront control. Opt. Express 2021, 29, 23006–23018.

5.Zhihua Fan, Qinling Deng, Xiaoyu Ma, Shaolin Zhou*, Phase Change Metasurfaces by Continuous or Quasi-Continuous Atoms for Active Optoelectronic Integration. Materials. 2021; 14(5):1272. https://doi.org/10.3390/ma14051272

6.Shaolin Zhou, Shanri Chen, Yufei Wu, Shaowei Liao, Hailiang Li, Changqing Xie, Mansun Chan, “Bistable active spectral tuning of one-dimensional nanophotonic crystal by phase change,” Opt. Express, vol. 28, no. 6, p. 8341, 2020.

7.Shaolin Zhou, Yufei Wu, Shanri Chen, Shaowei Liao, Honglin Zhang, Changqing Xie, Mansun Chan, “Phase change induced active metasurface devices for dynamic wavefront control,” J. Phys. D. Appl. Phys., 2020.

8.Shaolin Zhou, Kezhou Li, Yihan Chen, Shaowei Liao, Honglin Zhang, and Mansun Chan, “Phase Change Memory Cell With Reconfigured Electrode for Lower RESET Voltage,” IEEE J. Electron Devices Soc., vol. 7, no. September, pp. 1072–1079, 2019.

9.Shaolin Zhou, Songlin Mu., S. Raju, C. Prawoto, Xuexuan. Ruan, K. Ng, & Mansun Chan, Prototyping of Terahertz Metasurface by One-Step Lithographically Defined Templating. IEEE Photonics Technology Letters, 30(10), 971-974 (2018).

10. Xiaobin Cai, Shaolin Zhou*(equal contributions co-first author), Mingjun Hu, Junfeng Xiao, Naibo Zhang, and Jun Yang, Water based fluidic radio frequency metamaterials, J. Appl. Phys. 122, 184101 (2017).

11.Shaolin Zhou, Junbo Liu et al, “Effect of Near-Field Diffraction in Photolithography of Hexagonal Arrays for Dichroic Filters,” IEEE Photonics J. 8, 1–11 (2016).

12.Shaolin Zhou, Junbo Liu, Qian Deng, Changqing Xie, and Mansun Chan, “Depth-of-focus determination for Talbot lithography of large-scale free-standing periodic features,” IEEE Photonics Technol. Lett. 28(22), 2491-2494 (2016).  

13.Junbo Liu, Shaolin Zhou*, Yong Yang, Song Hu, Yu He, and Yinghong Chen, “The anomaly of periodicity-doubling in projection photolithography of periodic features,” IEEE Photonics Technol. Lett. 28(22), 2529-2532 (2016). 

14.Shaolin Zhou, Yong Yang, Song Hu, Xiangmin Xu, Scalar-based Analysis Of Phase Gratings etched in the Micro/nanofabrication process, IEEE Photonics Journal, 7(4), 4900111(2015).

15.Junbo Liu, Shaolin Zhou*, et al, “Spectrum-integral Talbot effect to extend Depth-of-Focus for lithography of periodic structures”, IEEE photonics Technology Letters, 27(20), 2201(2015). 

16.Shaolin Zhou, Mingjun Hu, Qiuquan Guo et al, Solvent-transfer assisted photolithography of high-density and high-aspect-ratio superhydrophobic micropillar arrays, J. Micromechanics Microengineering 25, 025005 (2015). 

17.Shaolin Zhou, Song Hu, Yongqi Fu, Xiangmin Xu, Jun Yang, “Moiré interferometry with high alignment resolution in proximity lithographic process”, Applied Optics 53(5), 951-959 (2014). 

18.Shaolin Zhou, Changqing Xie, Yong Yang, Song Hu et al, “Moiré-Based Phase Imaging for Sensing and Adjustment of In-Plane Twist Angle”, Photonics Technology Letters, IEEE. 25 (2013) 1847–1850.

19.Jiangping Zhu, Song Hu, Junsheng. Yu, Shaolin Zhou*, et al, Four-quadrant gratings moiré fringe alignment measurement in proximity lithography, Opt. Express 21, 3463-3473 (2013) .

20.Shaolin Zhou, Yong Yang, Lixin Zhao and Song Hu, “Tilt-modulated spatial phase imaging method for wafer-mask leveling in proximity lithography” Opt. Letters, 2010, 35(18): 3132-3134. 

1.【发明专利】李景熙,周绍林等,一种光电集成的光子数模转换器及方法,申请日期:2023.04.25,申请号:2023104586069

2.【发明专利】李景熙,周绍林等,一种双环微结构的光子神经突触器件与卷积运算网络模型,申请日期:2022.12.26,申请号:202211674522.0

3.【发明专利】林国政,周绍林等,一种基于超表面的光电集成空间光调制器,申请日期:2022.12.19,申请号:202211633543.8

4.【发明专利】孙继赓,周绍林等,一种基于相变多级振幅加权调控的集成光子突触,申请日期:2022.1130,申请号:2022115521172.4

5.【发明专利】周绍林;蔺举;陈振骐;陈润;李斌;吴朝晖,一种六相的正负电压电荷泵,申请日期:2022.10.17,申请号:2022112666126

6.【发明专利】邹永图,周绍林等,一种基于超表面集成的中红外热释电探测器,申请日期:2022.09.30,申请号:202211211005.X

7.【发明专利】叶子阳,周绍林等,一种可重构的集成光计算核模型,申请日期:2022.09.21,申请号:202211150996.5

8.【发明专利】李天,周绍林等,一种投影光刻莫尔对准装置及方法,申请日期:2022.09.30,申请号:202211207341.7

9.【发明专利】宋睿睿,周绍林等,一种可变焦近红外超表面透镜及其控制方法,申请号:202110847713.1,授权日期:2022.07.26,授权公告号:CN113687453 B

10.【发明专利】李天,周绍林等,一种振幅型超表面太赫兹压缩感知成像系统及方法,申请日期:2021.5.12,申请号:202110514839.7

11.【发明专利】罗锐,周绍林等,一种太赫兹有源超表面振幅型空间调制器(专利号:ZL 202110547775.0),授权日期:2022.08.16,授权公告号:CN113406815 B

12.【发明专利】周绍林,陈景梵,吴朝晖,李斌,一种有PVT鲁棒性基于全差分环形振荡器的时间数字转换器,申请日期:2021.11.16,授权公告日:2022.8.12

13.【发明专利】刘亮,周绍林等,一种基于几何相位超表面的涡旋光空间调制器,专利号:ZL 202110814668.X,授权日期:2023.3.21,授权公告号:113690624 B

14.【发明专利】邓钦玲,周绍林等,一种基于氧化钒相变的电触发可重构太赫兹数字超表面,申请日期,2020.12.31,申请号:202011640784.6

15.【发明专利】赵明,周绍林等,一种基于ARM核心的远程访问DLP 3D打印方法及装置,申请日期:2020.12.17,申请号:202011495709.5

16.【发明专利】朱元杰,赵明,周绍林等,一种基于面曝光式地多自由度3D打印方法、装置及系统(专利号:ZL 202010187723.2),授权日期:2021.06.15,授权公告号:CN111361145B

17.【发明专利】陈善日,吴雨霏,周绍林,一种基于光子晶体的可调谐帯阻滤波器,申请日期:2019.11.30,授权日期: 2022-03-25,授权公告号:110908017

18.【发明专利】吴雨霏,陈善日,周绍林,基于超表面的太赫兹可调谐滤波器,申请日期:2019.12.13,申请号:201911281537.9