演讲人简介：
       Ning Xi received his D.Sc. degree in Systems Science and Mathematics from Washington University in St. Louis, Missouri, USA in December 1993. He is University Distinguished Professor, the John D. Ryder Professor of Electrical and Computer Engineering and Director of Robotics and Automation Laboratory at Michigan State University. Currently, he serves as the Head and Chair Professor of Department of Mechanical and Biomedical Engineering at The City University of Hong Kong. Dr. Xi received the Best Paper Award in IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS) in August, 1995, and the Best Paper Award in the 1998 Japan-USA Symposium on Flexible Automation.  Dr. Xi was awarded the first Early Academic Career Award by the IEEE Robotics and Automation Society in May, 1999. He also received The Best Paper Award of IEEE Transactions on Automation Science and Engineering in 2007.  Dr. Xi was awarded SPIE Nano Engineering Award in 2007. In addition, he is a recipient of US National Science Foundation CAREER Award.  Dr. Xi is a fellow of IEEE.

报告内容简介：
        High accuracy motion control is one of the key technologies in nano manipulations and nano manufacturing. Rapid reducing the feature size in semiconductor device has posed new challenges for motion control in manufacturing ranging from defect review to mask repairing. Nano meter positioning accuracy has been a major bottle neck in manufacturing automation in semiconductor industries. In addition, nano meter scale motion control capability will enable a direct sensing and manipulation at a molecular level, which will significantly enhance the research and development in biomedical applications, such as drug discovery and disease diagnostics and treatments. In this talk a new motion control theory, i.e. non-vector space control, will be introduced. The dynamics associated with the motion control will be described in a non-vector space mathematical framework. This non-vector space dynamics model enables the development of the compressive feedback method that can overcome the major difficulties with high accuracy motion control including sensor noise and system calibration. The applications of the non-vector space motion control method will also be discussed, in particular nano manufacturing and biomedical systems.